Télécharger le livre :  Resonant MEMS

Part of the AMN book series, this book covers the principles, modeling and implementation as well as applications of resonant MEMS from a unified viewpoint. It starts out with the fundamental equations and phenomena that govern the behavior of resonant MEMS and then...
Editeur : Wiley-VCH
Parution : 2015-04-22
Collection : Advanced Micro and Nanosystems
Format(s) : PDF, ePub
163,47